Agilent High Capacity MS Rotary Vane Pumps: Leading Performance in a Simple, Robust, Compact and Reliable design. MS Single Stage Rotary Vane Pumps. Roughing and Backing High Vacuum Pumps. Agilent MS pumps are ideally suited for use in combination with Agilent Turbo & Diffusion pumps, or with HV pumps of any other manufacturer. Agilent VPD is a total vacuum solution provider for the Industrial High and Medium Vacuum equipment.